Organic contamination free surface machining

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11555250
APP PUB NO 20210339354A1
SERIAL NO

17241241

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Abstract

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A method includes receiving a metal component including a raw surface that includes a metal base, a first native oxide disposed on the metal base, and hydrocarbons disposed on the metal base. The method further includes machining the raw surface of the metal component to remove the first native oxide and a first portion of the hydrocarbons from the metal base. The machining generates an as-machined surface of the metal component including the metal base without the first native oxide and without the first portion of the hydrocarbons. The method further includes performing a surface machining of the as-machined surface of the metal component to remove a second portion of the hydrocarbons. The method further includes surface treating the metal component to remove a third portion of the hydrocarbons. The method further includes performing a cleaning of the metal component and drying the metal component.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bansal, Anurag Fremont, US 8 57
Chen, Shaofeng Austin, US 18 22
Farber, Matvey Redwood City, US 9 6
Gou, Pingping Foster City, US 4 2
Guo, Sheng Michael San Mateo, US 2 1
Guo, Yuanhong Mountain View, US 11 39
Hudgens, Jeffrey C San Francisco, US 151 2673
Kuchar, Michael Georgetown, US 18 256
Madiwal, Nagendra Cupertino, US 2 1
Murayama, Yuji Los Gatos, US 27 691
Radko, Marek W San Jose, US 3 2
Sansoni, Steven Victor Livermore, US 2 1
Suh, Song-Moon San Jose, US 29 587

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