Apparatus for collecting by-product in semiconductor manufacturing process

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11562943
APP PUB NO 20210134701A1
SERIAL NO

16669824

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Abstract

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ABSTRACT An apparatus is for collecting a by-product in a semiconductor manufacturing process. The apparatus includes: a housing cooling channel on an inner wall thereof to cool exhaust gas which is temperature-controlled by a heater while being introduced through a gas inlet of an upper plate; an internal collecting tower including multiple vertical plates and multiple horizontal plates that are assembled, and condensing and collecting a by-product from the exhaust gas; a main cooling channel having a serpentine shape and cooling the exhaust gas uniformly by using coolant while passing through the internal collecting tower; and a multi-connection pipe sequentially supplying the coolant to the upper plate cooling channel, the housing cooling channel, and the main cooling channel and discharging the coolant, by using a supply pipe and a discharge pipe that are provided outside the housing.

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Patent Owner(s)

Patent OwnerAddress
MILAEBO CO LTD32 JINWISANDAN-RO JINWI-MYEON PYEONGTAEK-SI GYEONGGI-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cho, Che Hoo Seongnam-si, KR 18 82
Han, Myung Pil Yongin-si, KR 5 35
Lee, Yeon Ju Osan-si, KR 24 42

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