Nano-fluidic device and chemical analysis apparatus

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United States of America Patent

PATENT NO 11565253
APP PUB NO 20180280974A1
SERIAL NO

15764529

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Abstract

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A nano-fluidic device includes: a first substrate that has a nanoscale groove on one surface; and a second substrate that is integrally provided with the first substrate by bonding one surface of the second substrate to the one surface of the first substrate and forms a nanochannel with the groove of the first substrate, in which either the first substrate or the second substrate includes at least a thin portion in a part of a position overlapping the nanochannel in plan view, and the thin portion is deformed by pressing to open and close the nanochannel.

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Patent Owner(s)

Patent OwnerAddress
JAPAN SCIENCE AND TECHNOLOGY AGENCYKAWAGUCHI-SHI SAITAMA 332-0012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kazoe, Yutaka Tokyo, JP 5 19
Kitamori, Takehiko Tokyo, JP 50 434
Pihosh, Yuriy Tsukuba, JP 2 2

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