Method and apparatus for mass production of AR diffractive waveguides

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United States of America Patent

PATENT NO 11577480
APP PUB NO 20210197507A1
SERIAL NO

16930387

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Abstract

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A method and apparatus for mass production of AR diffractive waveguides. Low-cost mass production of large-area AR diffractive waveguides (slanted surface-relief gratings) of any shape. Uses two-photon polymerization micro-nano 3D printing to realize manufacturing of slanted grating large-area masters of any shape (thereby solving the problem about manufacturing of slanted grating masters of any shape on the one hand, realizing direct manufacturing of large-size wafer-level masters on the other hand, and also having the advantages of low manufacturing cost and high production efficiency). Composite nanoimprint lithography technology is employed (in combination with the peculiar imprint technique and the composite soft mold suitable for slanted gratings) to solve the problem that a large-slanting-angle large-slot-depth slanted grating cannot be demolded and thus cannot be manufactured, and realize the manufacturing of the slanted grating without constraints (geometric shape and size).

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Patent Owner(s)

Patent OwnerAddress
QINGDAO UNIVERSITY OF TECHNOLOGY266000 QINGDAO UNIVERSITY OF TECHNOLOGY NO 777 JIALINGJIANG ROAD HUANGDAO DISTRICT QINGDAO CITY SHANDONG PROVINCE QINGDAO CITY SHANDONG PROVINCE 266000
QINGDAO 5D INTELLIGENT ADDITIVE MANUFACTURING TECHNOLOGY CO LTDNO 266 SHUANGZHU ROAD HUANGDAO DISTRICT QINDAO SHANDONG 266000

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lan, Hongbo Qingdao, CN 13 45
Xu, Quan Qingdao, CN 30 65
Zhao, Jiawe Qingdao, CN 1 0
Zhu, Xiaoyang Qingdao, CN 14 114

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