Vibrator, piezoelectric actuator, piezoelectric motor, robot, electronic component conveyance apparatus, and manufacturing method of vibrator

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United States of America Patent

PATENT NO 11581477
APP PUB NO 20180062065A1
SERIAL NO

15689373

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Abstract

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A vibrator includes a vibrating part including a pair of vibrating plates and a piezoelectric material provided between the pair of vibrating plates, a supporting part including a pair of supporting plates and an interplate portion provided between the pair of supporting plates, and a wire provided in the vibrating part and the supporting part, wherein the wire is exposed from the supporting part.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATIONTOKYO 160-8801

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Arakawa, Yutaka Hara, JP 75 365
Furuya, Noboru Chino, JP 20 93
Konishi, Akio Matsumoto, JP 126 662

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