Membrane cleaning apparatus

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United States of America Patent

PATENT NO 11673169
SERIAL NO

17294013

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Abstract

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A membrane cleaning apparatus for removing particles from a membrane, the apparatus including a membrane support and an electric field generating mechanism. The membrane support is for supporting the membrane. The electric field generating mechanism is for generating an electric field in the vicinity of the membrane when supported by the membrane support. The electric field generating mechanism may include: one or more collector electrodes; and a mechanism for applying a voltage across a membrane supported by the membrane support and the or each of the one or more collector electrodes.

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Patent Owner(s)

Patent OwnerAddress
ASML NETHERLANDS B VP O BOX 324 VELDHOVEN 5500 AH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kurilovich, Dmitry Hertogenbosch, NL 3 0
Nikipelov, Andrey Eindhoven, NL 30 43
Sbrizzai, Fabio Heeze, NL 2 0
Van, de Kerkhof Marcus Adrianus Helmond, NL 125 1774
Van, der Woord Ties Wouter Eindhoven, NL 16 4
Van, der Zande Willem Joan Bussum, NL 19 100
Van, Duivenbode Jeroen Veldhoven, NL 7 3
Vles, David Ferdinand Eindhoven, NL 29 68

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