Etching chelating agent, manufacturing method thereof, and etching solution composition

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United States of America Patent

PATENT NO 11674229
SERIAL NO

16954218

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Abstract

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The invention discloses an etching chelating agent, a manufacturing method thereof, and an etching solution composition. The etching chelating agent includes cellulose cross-linked polymer, and the cellulose cross-linked polymer is obtained by cross-linking and polymerizing carboxymethyl cellulose and an amine compound.

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Patent Owner(s)

Patent OwnerAddress
SHENZHEN CHINA STAR OPTOELECTRONICS SEMICONDUCTOR DISPLAY TECHNOLOGY CO LTDNO 9-2 TANGMING ROAD GONGMING STREET GUANGMING NEW DISTRICT SHENZHEN GUANGDONG 518132

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Wu, Haoxu Shenzhen, CN 5 0

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