Polishing compositions and methods of using same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11680186
APP PUB NO 20220145130A1
SERIAL NO

17091260

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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This disclosure relates to a polishing composition that includes at least one abrasive; at least one nitride removal rate reducing agent, an acid or a base; and water. The at least one nitride removal rate reduce agent can include a hydrophobic portion containing a C4 to C40 hydrocarbon group; and a hydrophilic portion containing at least one group selected from the group consisting of a sulfinite group, a sulfate group, a sulfonate group, a carboxylate group, a phosphate group, and a phosphonate group; in which the hydrophobic portion and the hydrophilic portion are separated by zero to ten alkylene oxide groups. The polishing composition can have a pH of from about 2 to about 6.5.

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Patent Owner(s)

Patent OwnerAddress
FUJIFILM ELECTRONIC MATERIALS U S A INC80 CIRCUIT DRIVE NORTH KINGSTOWN RI 02852

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ballesteros, Carl San Tan Valley, US 19 26
Mishra, Abhudaya Gilbert, US 32 182
Turner, Eric Phoenix, US 62 3673

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