Method for manufacturing ruthenium wiring

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United States of America Patent

PATENT NO 11686002
SERIAL NO

17444513

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Abstract

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A method for manufacturing a ruthenium wiring including (i) treating a metal surface including ruthenium using a first chemical solution including a compound having a functional group capable of coordinating to a ruthenium atom, and (ii) carrying out an etching treatment on the metal surface including ruthenium treated with the first chemical solution, using a second chemical solution.

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Patent Owner(s)

Patent OwnerAddress
TOKYO OHKA KOGYO CO LTDKAWASAKI-SHI KANAGAWA 211-0012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koga, Shinya Kawasaki, JP 20 292
Mori, Daijiro Kawasaki, JP 14 28
Okawa, Natsumi Kawasaki, JP 4 0
Takahashi, Kazuhiro Kawasaki, JP 419 3644
Wada, Yukihisa Kawasaki, JP 61 377

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