Substrate treating apparatus and inkjet apparatus

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United States of America Patent

PATENT NO 11707944
SERIAL NO

17407936

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Abstract

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Disclosed is a substrate treating apparatus. The substrate treating apparatus may include a stage including an accommodation area, onto or from which a substrate is loaded or unloaded, and a treatment area, in which the substrate is treated, a liquid discharge head that supplies a treatment liquid to the substrate, and a liquid receiving part that receives the treatment liquid pre-discharged by the liquid discharge head in the treatment area.

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Patent Owner(s)

Patent OwnerAddress
SEMES CO LTDSOUTH KOREA CHUNGNAM CHEONAN CITY NORTHWEST JISHAN CITY FOUR FIVE STREET NO 77 CHEONAN JEOLLANAM-DO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Kwang Jun Daejeon, KR 5 0
Jang, Yoon-Ok Chungcheongnam-do, KR 3 0
Kim, Sung Ho Chungcheongnam-do, KR 253 1085
Lee, Hyun Min Gyeongsangnam-do, KR 44 30
Lee, Jun Seok Chungcheongnam-do, KR 109 742

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