Multilayer film, optical device, photonic integrated circuit device, and optical transceiver

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United States of America Patent

PATENT NO 11709384
SERIAL NO

17332292

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Abstract

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A multilayer film includes a single-crystal silicon layer, a first layer containing Zr, a second layer containing ZrO2, and a third layer containing a perovskite oxide having an electrooptic effect. The first layer, the second layer, and the third layer are provided in this order above the single-crystal silicon layer, and the multilayer film is transparent to a wavelength to be used.

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Patent Owner(s)

Patent OwnerAddress
FUJITSU OPTICAL COMPONENTS LIMITED1-1 KAMIKODANAKA 4-CHOME NAKAHARA-KU KAWASAKI-SHI KANAGAWA 211-8588

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Mitamura, Nobuaki Saitama, JP 85 731

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