Chemical mechanical planarization composition for polishing oxide materials and method of use thereof

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United States of America Patent

PATENT NO 11718767
SERIAL NO

16533381

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Abstract

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Polishing compositions comprising ceria coated silica particles and organic acids having one selected from the group consisting of sulfonic acid group, phosphonic acid group, pyridine compound, and combinations thereof, with pH between 5 and 10 and electrical conductivity between 0.2 and 10 millisiemens per centimeter provide very high silicon oxide removal rates for advanced semiconductor device manufacturing.

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VERSUM MATERIALS US LLC8555 SOUTH RIVER PARKWAY PATENT DEPT TEMPE AS 85284

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Chia-Chien Hsinchu, TW 2 12
Li, Chris Keh-Yeuan Hsinchu, TW 2 4
Mallikarjunan, Anu Hsinchu, TW 1 3
Rose, Joseph D Gilbert, US 19 16
Shi, Xiaobo Chandler, US 87 369
Tsai, Ming-Shih Hsinchu, TW 12 110
Yang, Rung-Je Hsinchu, TW 9 8
Zhou, Hongjun Chandler, US 102 128

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