CMP composition including a novel abrasive

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United States of America Patent

PATENT NO 11725116
APP PUB NO 20210301178A1
SERIAL NO

17217097

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Abstract

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A chemical mechanical polishing composition includes a liquid carrier and colloidal silica particles dispersed in the liquid carrier. The colloidal silica particles have a positive charge of at least 10 mV in the liquid carrier and may be characterized as having: (i) a number average aspect ratio of greater than about 1.25 and (ii) a normalized particle size span by weight of greater than about 0.42. The polishing composition may further optionally include an iron-containing accelerator and a tungsten etch inhibitor, for example, when the polishing composition is a tungsten CMP composition.

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Patent Owner(s)

Patent OwnerAddress
CMC MATERIALS LLC1209 ORANGE STREET WILMINGTON DE 19801

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Dockery, Kevin P Aurora, US 19 71
Grumbine, Steven Aurora, US 42 315
Hains, Alexander W Aurora, US 13 46
Ivanov, Roman A Aurora, US 9 2
Krylova, Galyna Naperville, US 2 0
Long, Kim Naperville, US 5 13
Petro, Benjamin St. Charles, US 10 26
Sneed, Brian Vernon Hills, US 9 53

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