Plate, plating apparatus, and method of manufacturing plate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11725296
APP PUB NO 20210355596A1
SERIAL NO

17314491

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Abstract

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Provided is a plate that is arranged between a substrate and an anode in a plating tank. This plate has a plurality of circular pores on each one of at least three reference circles that are concentric with each other and that are different from each other in diameter. The plurality of circular pores include three circular pores that are arranged respectively on adjacent three of the at least three reference circles, and that have centers which are out of alignment with each other on an arbitrary radius on the plate.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATIONOTA-KU TOKYO 144-8510

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Shao Hua Tokyo, JP 24 25
Shamoto, Mitsuhiro Tokyo, JP 12 2
Shimoyama, Masashi Tokyo, JP 78 346

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