Systems and methods for operating a mems device based on sensed temperature gradients

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United States of America Patent

PATENT NO 11738994
APP PUB NO 20230107211A1
SERIAL NO

18080169

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Abstract

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An exemplary microelectromechanical device includes a MEMS layer, portions of which respond to an external force in order to measure the external force. A substrate layer is located below the MEMS layer and an anchor couples the substrate layer and MEMS layer to each other. A plurality of temperature sensors are located within the substrate layer to identify a temperature gradient being experienced by the MEMS device. Compensation is performed or operations of the MEMS device are modified based on temperature gradient.

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Patent Owner(s)

Patent OwnerAddress
INVENSENSE INC1745 TECHNOLOGY DRIVE SUITE 200 SAN JOSE CA 95110

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
deKoninck, David Brossard, CA 5 10
Jayaraman, Logeeswaran Veerayah Milpitas, US 10 77
Jin, Le Fremont, US 19 31
Johari-Galle, Houri Los Gatos, US 26 153
Kumar, Varun Subramaniam San Jose, US 6 9
Nitzan, Sarah Palo Alto, US 10 20
Shin, Jongwoo Pleasanton, US 66 823
Thompson, Matthew Julian Beaverton, US 34 126
Tsinker, Vadim Belmont, US 26 147

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