MEMS phase shifter including a substrate with a coplanar waveguide signal structure formed thereon and electrically insulated from a metal film bridge

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United States of America Patent

PATENT NO 11742556
APP PUB NO 20220302566A1
SERIAL NO

17514361

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Abstract

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A MEMS phase shifter, including: a substrate; a coplanar waveguide signal structure on the substrate; two coplanar waveguide ground wires respectively at two sides of the coplanar waveguide signal structure; insulating isolation layers respectively on the two coplanar waveguide ground wires; and a metal film bridge across and over the coplanar waveguide signal structure and forming a gap with the coplanar waveguide signal structure, both ends of the metal film bridge respectively attached to the insulating isolation layers on the two coplanar waveguide ground wires, wherein an insulating dielectric layer is provided on the coplanar waveguide signal structure, and the insulating dielectric layer comprises at least one concave part, which is concave in the direction towards the substrate, on the surface facing the metal film bridge.

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Patent Owner(s)

Patent OwnerAddress
BOE TECHNOLOGY GROUP CO LTDBEIJING 100015
BEIJING BOE TECHNOLOGY DEVELOPMENT CO LTDROOM 407 BUILDING 1 NO 9 DIZE ROAD BDA BEIJING 100176

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Guo, Jingwen Beijing, CN 38 15
Li, Chunxin Beijing, CN 30 11
Qu, Feng Beijing, CN 208 54
Wu, Qianhong Beijing, CN 38 20

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