Articles having diamond-only contact surfaces

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11752594
APP PUB NO 20180099379A1
SERIAL NO

15724248

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Abstract

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Diamond-containing articles such as composite materials shaped as some specific article, can be engineered such that bodies that contact the article only contact diamond. In an embodiment, the article may be in the form of equipment for handling semiconductor wafers such as vacuum or electrostatic chucks. In one embodiment, the diamond-containing article can be a composite of diamond particulate reinforcing a Si/SiC body such as reaction-bonded SiC. Lapping the diamond-reinforced RBSC body with progressively finer diamond grit removes some of the SiC/Si matrix material, leaving diamond particles of uniform height “standing proud” above the rest of the surface of the formed article. Further, if the diamond-containing article is sufficiently electrically conductive, it may be machinable using electrical discharge machining.

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Patent Owner(s)

Patent OwnerAddress
II-VI DELAWARE INC1105 NORTH MARKET STREET SUITE 1300 WILMINGTON DE 19801

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Gratrix, Edward Monroe, US 8 38
Karandikar, Prashant Avondale, US 3 6
Mastrobattisto, Daniel Southbury, US 4 3
Vance, William Newtown, US 2 18

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