Pick and place machine cleaning system and method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11756811
APP PUB NO 20210005483A1
SERIAL NO

16460929

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A device, mechanism, and methodology for regular and consistent cleaning of the vacuum aperture, nozzle, and contacting surfaces of a pick-and-place apparatus and the pick-up tools of automated or manual semiconductor device and die handling machines are disclosed. The cleaning material may include a cleaning pad layer with one or more intermediate layers that have predetermined characteristics, regular geometrical features, and/or an irregular surface morphology.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Broz, Jerry J Longmont, US 20 235
Humphrey, Alan E Reno, US 35 678
Humphrey, Bret A Reno, US 15 162
Smith, Wayne C Reno, US 11 99

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