Porous polishing pad and process for producing the same all fees

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11772236
APP PUB NO 20190314954A1
SERIAL NO

16385653

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

Embodiments relate to a porous polishing pad for use in a chemical mechanical planarization (CMP) process of semiconductors and a process for preparing the same. According to the embodiments, the size and distribution of the plurality of pores contained in the porous polishing pad can be adjusted in light of the volume thereof. Thus, the plurality of pores have an apparent volume-weighted average pore diameter in a specific range, thereby providing a porous polishing pad that is excellent in such physical properties as polishing rate and the like.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SK ENPULSE CO LTDPYEONGTAEK-SI

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahn, Jaein Gyeonggi-do, KR 14 23
Heo, Hye Young Gyeonggi-do, KR 22 29
Seo, Jang Won Busan, KR 130 360
Yun, Jong Wook Gyeonggi-do, KR 39 24
Yun, Sunghoon Gyeonggi-do, KR 21 23

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Apr 3, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Apr 3, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Apr 3, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00