Method of in situ modulation of structural material properties and/or template shape

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United States of America Patent

PATENT NO 11774467
SERIAL NO

17464644

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Abstract

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Probe structures, probe arrays, have varying intrinsic material properties along their lengths. Methods of forming probes and probe arrays comprise varying the plating parameters to provide varying intrinsic material properties. Some embodiments provide deposition templates created using multiphoton lithography to provide probes with varying lateral configurations along at least portion of their lengths.

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Patent Owner(s)

Patent OwnerAddress
MICROFABRICA INC7911 HASKELL AVENUE VAN NUYS CA 91406

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Yaglioglu, Onnik Chatsworth, US 17 133

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