Apparatus and system for a LiDAR antenna

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United States of America Patent

PATENT NO 11796644
SERIAL NO

16814587

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Abstract

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An apparatus including a light detection and ranging (LiDAR) antenna of an optical phased array includes a silicon-on-insulator substrate including a silicon wire waveguide embedded within the substrate and a grating layer disposed over the substrate. The grating layer includes a silicon nitride layer coating the silicon-on-insulator substrate and including a plurality of etchings formed in a direction perpendicular to a longitudinal axis of the optical phased array and a silicon oxynitride layer coating the silicon nitride layer and filling the etchings. The etchings are relatively thin in the direction of the longitudinal axis of the optical phased array at a first end of the optical antenna and are relatively thick in the direction of the longitudinal axis at a second end. The etchings gradually increase in thickness between the first end of the optical phased array and the second end of the optical antenna.

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Patent Owner(s)

Patent OwnerAddress
GM GLOBAL TECHNOLOGY OPERATIONS LLC300 RENAISSANCE CENTER DETROIT MI 48265-3000

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Huang, Biqin Rancho Palos Verdes, US 28 88
Sarkissian, Raymond Studio City, US 22 104
Sayyah, Keyvan Santa Monica, US 61 1074

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