Micro-electro mechanical device with vibration sensor and micro-electro mechanical microphone

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United States of America Patent

PATENT NO 11800298
APP PUB NO 20220408197A1
SERIAL NO

17738025

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Abstract

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A micro-electro mechanical device includes a casing, a vibration sensor, a vibration membrane assembly, and a micro-electro mechanical microphone. The casing has a sound-receiving hole, and the vibration sensor is disposed in the casing. The vibration membrane assembly is disposed in the casing and corresponds to the vibration sensor. The micro-electro mechanical microphone is disposed in the casing and corresponds to the sound-receiving hole, and a back cavity of the micro-electro mechanical microphone is formed in the casing. The back cavity at least partially overlaps with areas corresponding to a vertical projection of the vibration membrane assembly.

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Patent Owner(s)

Patent OwnerAddress
MERRY ELECTRONICS(SHENZHEN) CO LTDSHENZHEN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chang, Chao-Sen Taichung, TW 32 106
Chen, Jen-Yi Taichung, TW 44 578
Lee, Yueh-Kang Taichung, TW 13 6

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