High-precision etching method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11827988
APP PUB NO 20220389591A1
SERIAL NO

17891025

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An embodiment of the present disclosure provides an etching method, having the following steps: forming a modified layer having a thickness of one or several atom layers on a selected region of a surface of a semiconductor material layer by using a modifier; and removing the modified layer. When a semiconductor is processed, this method achieves precise control over the etching thickness and improves the etching rate at the same time.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
THE INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCESNO 3 BEITUCHENG WEST ROAD CHAOYANG DISTRICT BEIJING 100029

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Du, Anyan Beijing, CN 3 1
Li, Chen Beijing, CN 352 2814
Yin, Xiaogen Beijing, CN 6 3
Zhang, Yongkui Beijing, CN 8 40
Zhu, Huilong Poughkeepsie, US 705 13304

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 May 28, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 May 28, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 May 28, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00