Stripping method and stripping device for silicon carbide single crystal wafers

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United States of America Patent

PATENT NO 11827997
APP PUB NO 20230076324A1
SERIAL NO

17986932

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Abstract

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The present disclosure relates to the field of manufacturing of silicon carbide (SiC) single crystal wafers, and discloses a stripping method and a stripping device for SiC single crystal wafers. The single crystal wafers obtained by the present disclosure have no damage layer or stress residue on surfaces or sub-surfaces, and are simple in operation and low in cost.

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Patent Owner(s)

Patent OwnerAddress
ZJU-HANGZHOU GLOBAL SCIENTIFIC AND TECHNOLOGICAL INNOVATION CENTER311200 NO 733 JIANSHE THIRD ROAD ECONOMIC AND TECHNOLOGICAL DEVELOPMENT ZONE XIAOSHAN DISTRICT HANGZHOU CITY ZHEJIANG PROVINCE HANGZHOU CITY ZHEJIANG PROVINCE 311200

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Geng, Wenhao Hangzhou, CN 1 0
Pi, Xiaodong Hangzhou, CN 2 0
Wang, Rong Hangzhou, CN 224 1444
Yang, Deren Hangzhou, CN 5 2

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