Storage apparatus, transporting device and transporting method for front opening unified pod

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United States of America Patent

PATENT NO 11830750
APP PUB NO 20230045880A1
SERIAL NO

17515809

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A storage apparatus, and a transporting device and a transporting method for a Front Opening Unified Pod (FOUP) are provided. The storage apparatus includes: at least two carrying bins configured to carry the FOUP; and a rotating component. The at least two carrying bins are connected to the rotating component at different positions of the rotating component. The rotating component is configured to change positions of the at least two carrying bins through rotation of the rotating component.

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Patent Owner(s)

Patent OwnerAddress
CHANGXIN MEMORY TECHNOLOGIES INCHEFEI CITY ANHUI 230601

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Tianzhu Hefei, CN 4 1

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