Floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method

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United States of America Patent

PATENT NO 11839944
APP PUB NO 20230029755A1
SERIAL NO

17891015

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Abstract

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A floating non-contact ultrasonic enhanced flexible sub-aperture polishing device and method are disclosed, an X-axis moving platform, a Y-axis moving platform, a Z-axis moving platform and a workpiece swinging platform in linkage control ensure normal lines of a tool and a workpiece are kept at an identical angle to realize sub-aperture processing; the ventilation main shaft acts air pressure on the ball spline's end portion to form an axial thrust to let the tool axially float; a dynamic balance among hydrodynamic pressure, air pressure and dynamic pressure is performed on the polishing liquid by rotation of the flexible tool; a tiny gap between the tool and workpiece is formed by elastic deformation of the flexible tool due to the dynamic pressure; a shearing force for removing materials is generated when the polishing liquid flows through the gap; a cavitation effect in the gap is formed by ultrasonic waves.

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Patent Owner(s)

Patent OwnerAddress
ZHEJIANG UNIVERSITYXIHU DISTRICT HANGZHOU ZHEJIANG 310058

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Han, Fang Hangzhou, CN 20 126
Ju, Bingfeng Hangzhou, CN 7 1
Sun, Anyu Hangzhou, CN 4 1
Wu, Lu Hangzhou, CN 130 337
Zhu, Wule Hangzhou, CN 3 1

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