Laminar flow restrictor and seal for same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11841036
APP PUB NO 20220220986A1
SERIAL NO

17710290

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Abstract

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Apparatuses for controlling gas flow are important components for delivering process gases for semiconductor fabrication. These apparatuses for controlling gas flow frequently rely on flow restrictors which can provide a known flow impedance of the process gas. In one embodiment, a flow restrictor is disclosed, the flow restrictor constructed of a plurality of layers, one or more of the layers having a flow passage therein that extends from a first aperture at a first end of the flow restrictor to a second aperture at a second end of the flow restrictor.

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Patent Owner(s)

Patent OwnerAddress
ICHOR SYSTEMS INC3185 LAURELVIEW CT FREMONT CA 94538

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Davis, Christopher Bryant Georgetown, US 8 4
Kovacic, Matthew Eric Reno, US 6 4
McIntyre, Zachariah Ezekiel Houston, US 7 6
Penley, Sean Joseph Sparks, US 8 4
Wright, Tyler James Reno, US 7 6

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