Substrate processing apparatus and substrate processing method

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United States of America Patent

PATENT NO 11862474
APP PUB NO 20210175093A1
SERIAL NO

17104086

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Abstract

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A substrate processing apparatus includes a temperature detector, a calculation unit and an execution unit. The temperature detector is configured to detect a temperature of a substrate on which a processing liquid is discharged. The calculation unit is configured to calculate, by using a given calculation formula, an etching amount of the substrate based on the temperature detected by the temperature detector. The execution unit configured to perform an etching processing on the substrate by the processing liquid based on the etching amount.

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Patent Owner(s)

Patent OwnerAddress
TOKYO ELECTRON LIMITEDTOKYO 107-6325

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Inoue, Taisei Koshi, JP 10 31
Nakazawa, Takashi Koshi, JP 82 1049
Sakurai, Hiroki Koshi, JP 33 215

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