Solid-state power amplifiers with cooling capabilities

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United States of America Patent

PATENT NO 11870202
SERIAL NO

17009851

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Abstract

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Methods and apparatus for processing a substrate. For example, a processing chamber can include a power source, an amplifier connected to the power source, comprising at least one of a gallium nitride (GaN) transistor or a gallium arsenide (GaAs) transistor, and configured to amplify a power level of an input signal received from the power source to heat a substrate in a process volume, and a cooling plate configured to receive a coolant to cool the amplifier during operation.

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Patent Owner(s)

  • APPLIED MATERIALS, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Agarwal, Prashant Singapore, SG 24 164
Jupudi, Ananthkrishna Singapore, SG 56 228
Koh, Lean Wui Singapore, SG 1 0
Putti, Rajesh Kumar Singapore, SG 3 2
Ramachandran, Vinodh Singapore, SG 14 6

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