Consolidated filter arrangement for devices in an RF environment

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11870252
APP PUB NO 20210059018A1
SERIAL NO

17080579

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Abstract

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A method includes generating, external to a radio frequency (RF) environment and based on a process recipe, a first signal and a second signal. The method further includes converting the first signal into an alternative signal and transmitting, over a non-conductive communication link, the alternative signal to a converter within the RF environment within a processing chamber of a substrate processing system. The method further includes converting the alternative signal into a third signal by the converter inside the RF environment within the processing chamber. The method further includes controlling a first plurality of elements disposed within the RF environment within the processing chamber via one or more first devices disposed within the RF environment within the processing chamber using the third signal and controlling a second plurality of elements of the substrate processing system via one or more second devices of the substrate processing system using the second signal.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Babayan, Steve E Los Altos, US 7 136
Blank, Chris Gilroy, US 5 10
Criminale, Phillip Livermore, US 23 53
Edmonson, Scott San Jose, US 6 25
Marohl, Dan A San Jose, US 29 512
Sommer, Phillip R Newark, US 54 5312

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