Ultrasonic device and ultrasonic apparatus

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United States of America Patent

PATENT NO 11872592
APP PUB NO 20200298276A1
SERIAL NO

16824830

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Abstract

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An ultrasonic device includes a base material that has an opening, a vibration plate that is provided on the base material and closes the opening, and a piezoelectric element that is provided on the vibration plate, in which the vibration plate has a first layer provided on the base material, and a second layer that is disposed between the first layer and the piezoelectric element and that suppresses diffusion of a component contained in the piezoelectric element, and a bending rigidity of the second layer is equal to or larger than a bending rigidity of the first layer.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPORATIONTOKYO 160-8801

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kojima, Chikara Matsumoto, JP 84 164
Ohashi, Koji Matsumoto, JP 89 402
Osawa, Eiji Chino, JP 34 140

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