Cleaning member mounting mechanism and substrate cleaning apparatus

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United States of America Patent

PATENT NO 11894244
SERIAL NO

17336627

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A cleaning member mounting mechanism has: a cleaning member holding part, to which a cleaning member assembly having a cleaning member for cleaning a substrate W can be mounted; a member rotation part for rotating the cleaning member assembly held by the cleaning member holding part; and a moving part which moves the cleaning member holding part along an axial direction when the cleaning member assembly is removed, thereby to bring the cleaning member holding part into a rotation fixed position to restrict a rotation of the cleaning member holding part.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATIONTOKYO

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Fujimoto, Tomoaki Tokyo, JP 7 1
Inoue, Takuya Tokyo, JP 158 949
Miyazaki, Mitsuru Tokyo, JP 83 501

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