Nozzle, substrate processing apparatus including the same, and substrate processing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11897005
APP PUB NO 20230074783A1
SERIAL NO

17987062

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

The inventive concept provides a nozzle for dispensing a treatment liquid in which plasma is generated. The nozzle includes a body having an interior space, a liquid supply unit that supplies the treatment liquid into the interior space, and electrodes that generate the plasma in the interior space. The liquid supply unit supplies the treatment liquid in a bubbling state into the interior space, or causes the treatment liquid to bubble in the interior space.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
SEMES CO LTDSOUTH KOREA CHUNGNAM CHEONAN CITY NORTHWEST JISHAN CITY FOUR FIVE STREET NO 77 CHEONAN JEOLLANAM-DO

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Choi, Sehyeong Cheonan-si, KR 2 1
Kim, Sunmi Yeongam-gun, KR 23 219
Kwon, Oh Jin Cheonan-si, KR 31 138

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Aug 13, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Aug 13, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 13, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00