Ruthenium-etching solution, method for manufacturing ruthenium-etching solution, method for processing object to be processed, and method for manufacturing ruthenium-containing wiring

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United States of America Patent

PATENT NO 11898081
APP PUB NO 20210155851A1
SERIAL NO

17095159

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Abstract

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A ruthenium-etching solution for carrying out an etching process on ruthenium. The etching solution includes orthoperiodic acid and ammonia, in which a pH is 8 or higher and 10 or lower. A method for manufacturing the ruthenium-etching solution, a method for processing an object to be processed including carrying out an etching process on an object to be processed including ruthenium using the ruthenium-etching solution, and a method for manufacturing a ruthenium-containing wiring.

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Patent Owner(s)

Patent OwnerAddress
TOKYO OHKA KOGYO CO LTDKAWASAKI-SHI KANAGAWA 211-0012

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ohhashi, Takuya Kawasaki, JP 11 27
Wada, Yukihisa Kawasaki, JP 61 377

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