Electro optical devices fabricated using deep ultraviolet radiation

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United States of America Patent

PATENT NO 11899293
APP PUB NO 20210247570A1
SERIAL NO

16871658

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Abstract

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An optical device is described. At least a portion of the optical device includes ferroelectric non-linear optical material(s) and is fabricated utilizing ultraviolet lithography. In some aspects the at least the portion of the optical device is fabricated using deep ultraviolet lithography. In some aspects, the short range root mean square surface roughness of a sidewall of the at least the portion of the optical device is less than ten nanometers. In some aspects, the at least the portion of the optical device has a loss of not more than 2 dB/cm.

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Patent Owner(s)

Patent OwnerAddress
HYPERLIGHT CORPORATION501 MASSACHUSETTS AVE CAMBRIDGE MA 02139

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Luke, Kevin Cambridge, US 22 49
Zhang, Mian Cambridge, US 44 38

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