Substrate treatment method and substrate treatment equipment

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United States of America Patent

PATENT NO 11901174
APP PUB NO 20210249259A1
SERIAL NO

17241522

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Provided are a substrate treatment method and a substrate treatment equipment enabling greater suppression of corrosion or oxidation of metal wiring exposed on a substrate surface. The present invention relates to a substrate treatment equipment having a treatment chamber wherein a substrate is disposed, and whereto a substrate treatment solution for treating the substrate is supplied. This equipment is provided with an inert gas filling mechanism for filling with an inert gas the interior of the treatment chamber wherein the substrate is disposed, and, near or inside the treatment chamber, a catalytic unit filled with a platinum-group metal catalyst wherethrough a hydrogen-dissolved water including hydrogen added to ultra-pure water is passed. Obtained by passing the hydrogen-dissolved water through the platinum-group metal catalyst, a hydrogen-dissolved treatment solution is supplied as the substrate treatment solution into the treatment chamber by the equipment.

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Patent Owner(s)

Patent OwnerAddress
ORGANO CORPORATION2-8 SHINSUNA 1-CHOME KOTO-KU TOKYO 1368631 ?1368631

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Murayama, Masami Tokyo, JP 44 1157
Yamanaka, Koji Tokyo, JP 93 963
Yamashita, Yukinari Tokyo, JP 17 261
Yano, Daisaku Tokyo, JP 12 22

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