Microphone chip, microphone, and terminal device
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United States of America Patent
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Feb 13, 2024
Grant Date -
N/A
app pub date -
Feb 25, 2022
filing date -
Aug 30, 2019
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
The disclosure provides a microphone chip, a microphone, and a terminal device. The microphone chip includes a substrate and a diaphragm that are disposed oppositely, a reflector located on a side that is of the diaphragm and that is close to the substrate, a grating group located between the substrate and the diaphragm, and an optical emitter and an optical detector that are located between the substrate and the grating group. The grating group includes a plurality of gratings, and distances between at least two gratings in the plurality of gratings and the reflector are different.
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