Cleaning liquid composition

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11905490
SERIAL NO

17275629

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Abstract

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An object of the present invention is to provide a cleaning liquid that effectively removes in a short time organic residues and abrasive grains derived from a slurry in a semiconductor substrate in which a Co contact plug and/or Co wiring are present.

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Patent Owner(s)

Patent OwnerAddress
KANTO KAGAKU KABUSHIKI KAISHATOKYO

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takanaka, Areji Saitama, JP 3 0

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