Substrate cleaning device, abnormality determination method of substrate cleaning device, storage medium

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United States of America Patent

PATENT NO 11911806
APP PUB NO 20220258217A1
SERIAL NO

17670522

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Provided is a substrate cleaning device, an abnormality determination method of a substrate cleaning device, and an abnormality determination program of a substrate cleaning device for determining whether there is an abnormality in a roll cleaning member that is attached. A substrate cleaning device includes: a holder to which a roll cleaning member for cleaning a substrate is attached in a detachable manner; a rotation device which makes the roll cleaning member attached to the holder rotate; a sensor which measures information concerning a vibration of the roll cleaning member during rotation; and a control device which determines, based on a measurement result of the sensor, whether there is an abnormality in the roll cleaning member attached to the holder.

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Patent Owner(s)

Patent OwnerAddress
EBARA CORPORATION11-1 HANEDA ASAHI-CHO OTA-KU TOKYO 1448510

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ishikawa, Hiroshi Tokyo, JP 342 5222
Matsushita, Kunimasa Tokyo, JP 8 20
Nishijima, Masumi Tokyo, JP 4 3

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