Preventive maintenance method for chamber of metal etching machine

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United States of America Patent

PATENT NO 11911809
APP PUB NO 20230143115A1
SERIAL NO

17958548

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present application discloses a preventive maintenance method for a chamber of a metal etching machine. An optimized burning cleaning recipe is added before the chamber is opened, and metal substances remaining on the surface of an electrostatic chuck are removed by adopting a cleaning/pumping down multi-step alternate method. Before the chamber is opened for preventive maintenance, the phenomenon of metal particles remaining on the surface of the electrostatic chuck can be significantly improved, thus solving the downtime problem caused by abnormal backside helium and ensuring the stability of mass production.

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Patent Owner(s)

Patent OwnerAddress
SHANGHAI HUALI MICROELECTRONICS CORPORATIONNO 6 LIANGTENG ROAD PUDONG NEW AREA SHANGHAI 201314

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Minjie Shanghai, CN 29 334
Ren, Yu Shanghai, CN 24 158
Tang, Zaifeng Shanghai, CN 8 2
Xu, Jin Shanghai, CN 309 1854

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Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Aug 27, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Aug 27, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Aug 27, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00