Aluminum compounds and methods of forming aluminum- containing film using the same

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United States of America Patent

PATENT NO 11912728
APP PUB NO 20210147450A1
SERIAL NO

17156678

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Abstract

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The present disclosure relates to a novel aluminum-containing compound, a method of preparing the aluminum-containing compound, a precursor composition for forming a film including the aluminum-containing precursor compound, and a method of forming an aluminum-containing film using the precursor composition for forming a film.

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Patent Owner(s)

Patent OwnerAddress
UP CHEMICAL CO LTD81 SANDAN-RO 197BEON-GIL PYEONGTAEK-SI GYEONGGI-DO 17749 17749

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahn, Sungwoo Yangju-si, KR 3 2
Han, Won Seok Pyeongtaek-si, KR 44 157
Kim, Dae-young Pyeongtaek-si, KR 284 9159
Koh, Wonyong Daejeon, KR 21 1513
Ma, Dong Hwan Seoul, KR 4 1

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