Etching of alkali metal compounds

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United States of America Patent

PATENT NO 11926903
APP PUB NO 20220396732A1
SERIAL NO

17836578

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Abstract

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Methods for etching alkali metal compounds are disclosed. Some embodiments of the disclosure expose an alkali metal compound to an alcohol to form a volatile metal alkoxide. Some embodiments of the disclosure expose an alkali metal compound to a β-diketone to form a volatile alkali metal β-diketonate compound. Some embodiments of the disclosure are performed in-situ after a deposition process. Some embodiments of the disclosure provide methods which selectively etch alkali metal compounds.

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Patent Owner(s)

Patent OwnerAddress
APPLIED MATERIALS INC3050 BOWERS AVENUE SANTA CLARA CA 95054

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bagul, Nilesh Chimanrao Bangalore, IN 14 359
Chakraborty, Tapash Maharashtra, IN 19 61
Deepak, Nitin Maharashtra, IN 17 26
Goradia, Prerna Sonthalia Mumbai, IN 34 1008
Sivaramakrishnan, Visweswaren Cupertino, US 114 5314
Upadhye, Bahubali S Bangalore, IN 10 15

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