Inspection apparatus and inspection method

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11940394
APP PUB NO 20230349845A1
SERIAL NO

18350221

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Abstract

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An inspection apparatus for inspecting an inspection target object, includes an X-ray generation tube having a target including an X-ray generation portion that generates X-rays by irradiation with an electron beam, and configured to emit X-rays to the inspection target object, and a plurality of X-ray detectors, wherein each of the plurality of X-ray detectors detects X-rays emitted from a foreign substance existing on an inspection target surface of the inspection target object irradiated with the X-rays from the X-ray generation portion and totally reflected by the inspection target surface.

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Patent Owner(s)

  • CANON ANELVA CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tsukamoto, Takeo Niigata, JP 217 3544

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