System and method of cleaning and inspecting semiconductor die carrier

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11945004
APP PUB NO 20230058682A1
SERIAL NO

17454514

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A semiconductor manufacturing equipment cleaning system has a multi-station cleaning and inspection system. Within semiconductor manufacturing equipment cleaning system, a tray cleaning station uses a first rotating brush passing over a first surface of a carrier and possibly semiconductor die, and a second rotating brush passing over a second surface of the carrier and semiconductor die opposite the first surface of the carrier and semiconductor die. Debris and contaminants dislodged from the first surface and second surface of the carrier by the first rotating brush and second rotating brush are removed under vacuum suction. A conveyor transports the carrier through the multi-station cleaning and inspection system. The first rotating brush and second rotating brush move in tandem across the first surface and second surface of the carrier. Air pressure is injected across the first rotating brush and second rotating brush to further remove debris and contaminants.

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Patent Owner(s)

Patent OwnerAddress
UTAC HEADQUARTERS PTE LTD22 ANG MO KIO INDUSTRIAL PARK 2 SINGAPORE 569506

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cai, Zong Xiang Dongguan, CN 2 0
Hu, Tao Dongguan, CN 105 490
Lam, Wing Keung Dongguan, CN 9 319
Tan, Hua Hong Singapore, SG 13 61
Wu, Yao Hong Dongguan, CN 2 0
Xian, Wei Ming Dongguan, CN 2 0

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