Chalcogenide sputtering target and method of making the same

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United States of America Patent

PATENT NO 11946132
APP PUB NO 20210095370A1
SERIAL NO

17114216

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Abstract

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In one embodiment, a physical vapor deposition device includes a phase change material sputtering target includes a primary matrix and at least one additional phase. The primary matrix includes at least one element from Group VI of the periodic table excluding oxygen and one or more elements from Group IV or Group V of the periodic table. The additional phase is substantially homogenously dispersed in the primary matrix.

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Patent Owner(s)

  • HONEYWELL INTERNATIONAL, INC.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pinter, Michael R Spokane, US 19 153

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