Hafnium oxide corrosion inhibitor

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11946148
SERIAL NO

17416328

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Abstract

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Described herein is an etching solution suitable for the selective removal of TiSiN over hafnium oxide from a microelectronic device, which consists essentially of: water; at least one alkaline ammonium compound selected from the group consisting of ammonium hydroxide, a quaternary ammonium hydroxide, ammonium fluoride, and a quaternary ammonium fluoride; at least one peroxide compound; a water-miscible organic solvent; at least one nitrogen containing compound selected from the group consisting of a C4-12 alkylamine, a polyalkylenimine, and a polyamine; and optionally at least one chelating agent.

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Patent Owner(s)

Patent OwnerAddress
VERSUM MATERIALS US LLC8555 SOUTH RIVER PARKWAY PATENT DEPT TEMPE AS 85284

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lee, Yi-Chia Chupei, TW 50 205
Liu, Wen Dar Chupei, TW 41 209

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