Electrostatic chuck with high insulation performance and electrostatic attraction force

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11951583
SERIAL NO

17462048

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

An electrostatic chuck includes a ceramic base, a ceramic dielectric layer, an electrostatic electrode, and a ceramic insulating layer. The ceramic dielectric layer is positioned on the ceramic base and is thinner than the ceramic base. The electrostatic electrode is embedded between the ceramic dielectric layer and the ceramic base. The ceramic insulating layer is positioned on the ceramic dielectric layer and is thinner than the ceramic dielectric layer. The ceramic insulating layer has a higher volume resistivity and withstand voltage than the ceramic dielectric layer, and the ceramic dielectric layer has a higher dielectric constant than the ceramic insulating layer.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

Patent OwnerAddress
NGK INSULATORS LTDNAGOYA-CITY AICHI-KEN 467-8530

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Aikawa, Kenichiro Handa, JP 16 87
Kuno, Tatsuya Nagoya, JP 64 80
Takebayashi, Hiroshi Handa, JP 103 140

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Oct 9, 2027
7.5 Year Payment $3600.00 $1800.00 $900.00 Oct 9, 2031
11.5 Year Payment $7400.00 $3700.00 $1850.00 Oct 9, 2035
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00