Polishing pad comprising window similar in hardness to polishing layer

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United States of America Patent

PATENT NO 11964360
APP PUB NO 20200164483A1
SERIAL NO

16619378

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Abstract

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Embodiments relate to a polishing pad, which comprises a window having a hardness similar to that of its polishing layer. Since the polishing pad comprises a window having a hardness and a polishing rate similar to those of its polishing layer, it can produce an effect of preventing scratches on a wafer during a CMP process. In addition, the polishing layer and the window of the polishing pad have a similar rate of change in hardness with respect to temperature, so that they can maintain a similar hardness despite a change in temperature during the CMP process.

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Patent Owner(s)

Patent OwnerAddress
SK ENPULSE CO LTD1043 GYEONGGI-DAERO GYEONGGI-DO PYEONGTAEK-SI 17784

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ahn, Jaein Gyeonggi-do, KR 14 23
Ryou, Joonsung Gyeonggi-do, KR 4 5
Seo, Jang Won Busan, KR 130 360
Yun, Sunghoon Gyeonggi-do, KR 21 23

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