Piston assembly, air cylinder and apparatus for processing substrate

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11965597
APP PUB NO 20230400097A1
SERIAL NO

18099942

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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The present disclosure is to provide a piston assembly in which a particle does not leak out of a cylinder, and including, in an embodiment, a piston body; a piston rod connected to the piston body; a first groove formed in an outer surface of the piston body; and a particle discharge flow path extending from an internal space of the piston body to the outer surface of the piston body.

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First Claim

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Patent Owner(s)

Patent OwnerAddress
SEMES CO LTD77 4SANDAN 5-GIL JIKSAN-EUP SEOBUK-GU CHEONAN-SI CHUNGCHEONGNAM-DO 31040

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Eom, Sung Hun Chungcheongnam-do, KR 13 6
Hong, Nam Ki Chungcheongnam-do, KR 4 0

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