Closed-loop microelectromechanical accelerometer with compensation of spurious vibration modes and process for manufacturing a microelectromechanical accelerometer

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United States of America

PATENT NO 11965906
SERIAL NO

17866378

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Abstract

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A closed-loop microelectromechanical accelerometer includes a substrate of semiconductor material, an out-of-plane sensing mass and feedback electrodes. The out-of-plane sensing mass, of semiconductor material, has a first side facing the supporting body and a second side opposite to the first side. The out-of-plane sensing mass is also connected to the supporting body to oscillate around a non-barycentric fulcrum axis parallel to the first side and to the second side and perpendicular to an out-of-plane sensing axis. The feedback electrodes are capacitively coupled to the sensing mass and are configured to apply opposite electrostatic forces to the sensing mass.

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Patent Owner(s)

Patent OwnerAddress
STMICROELECTRONICS S R L20864 AGRATE BRIANZA (MB)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Darmanin, Jean Marie Marsaxlokk, MT 4 2
Gattere, Gabriele Castronno, IT 52 66
Rizzini, Francesco Passirano, IT 25 32
Valzasina, Carlo Gessate, IT 57 209

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